H112 large
movement stage
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Key
features:
• Suitable for most major brand microscopes.
• 1um or better repeatability
• Quiet
and reliable
• Wide range of wafer holders |
The H112
stage is ideal for scanning a wide range of semiconductor
wafers, photo masks, flat panel displays and printed circuit
boards. The H112 can easily accommodate 12 inch (300mm)
wafers and works with many robot arm wafer loaders. In
addition, the H112 can be used for transmitted light applications
with 250 x 250mm transmitted light area.
Specifications:
| Travel range: |
305 mm x 305 mm |
 |
| Minimum step size: |
0.04um |
|
| Max load: |
25kg |
|
| Max Speed: |
60mm/s |
| |
The
H112 range is suitable for the following Microscopes:
Click
here to see the extensive range of sample holders
available for the H112 stage, inserts
can also be customized for many applications.
Options:
The H112 stages come with a range of Ball
Screw pitch options, choose a 2mm pitch balls screw for accuracy
and smoothness under high magnification and a 5mm pitch ball
screw for faster speeds. Linear or Rotary encoders can be
fitted to all H112 stages.
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