Datasheet available >> Key features: • Suitable for most major brand microscopes. • 1um or better repeatability • Quiet and reliable • Wide range of wafer holders.

The H116 can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.

Click here for a variety of sample holders available, stage inserts can be customized for most applications.

Specifications:

Travel range:	254 mm x 205 mm
Minimum step size:	0.04um
Max load:	25kg
Max Speed:	60mm/s

Options:

The H116 stages come with a range of Ball Screw pitch options, choose a 2mm pitch balls screw for accuracy and smoothness under high magnification and a 5mm pitch ball screw for faster speeds. Linear or Rotary encoders can be fitted to all H116 stages.

Ball screws		2mm*	5mm
Motors		200 step
Rotary encoders	2000* Counts per revolution		4000 Counts per revolution
Linear Encoders	0.5um	0.1um*	0.05um
* Standard option.

GB Patent No. 2411249, US Patent No. 7330307